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PV02800 - SEMI PV28 - Test Method for Measuring Resistivity or Sheet Resistance with a Single-Sided Noncontact Eddy-Current Gauge Revision:SEMI PV28-0212 - Superseded This Standard specifies the measurement

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Description

This Standard specifies the measurement method of polarizing films and other films for FPD by using contour matching method

FPD製造に使用するプロセスツールのツールポートに関わる主要な要求事項を規定する。これらの主要要求事項は,それらを標準化することによって,搬送装置とツール間のインタフェースをうまく機能することにある。この標準化は,マテリアルハンドリング装置の選択に自由度を持たせて,コスト低減に配慮したインタフェースを奨励することを目的とする。

This edition was approved for publication by the global Audits and Reviews Subcommittee on November 24

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PV02800 - SEMI PV28 - Test Method for Measuring Resistivity or Sheet Resistance with a Single-Sided Noncontact Eddy-Current Gauge Revision:SEMI PV28-0212 - Superseded This Standard specifies the measurementThis Standard was technically approved by the Photovoltaic Materials Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 4, 2015. Available at www. semiviews. org and www. semi. org in March 2016; originally published February 2012. Resistivity is a primary quantity for characterization and specification of material used for photovoltaic (PV) devices. Sheet resistance is a

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